This book constitutes the refereed proceedings of the 6th International Workshop on Systems, Architectures, Modeling, and Simulation, SAMOS 2006, held in Samos, Greece on July 2006. The 47 revised full papers presented together with 2 keynote talks were thoroughly reviewed and selected from 130 submissions. The papers are organized in topical sections on system design and modeling, wireless sensor networks, processor design, dependable computing, architectures and implementations, and embedded sensor systems.